Product Features
Application Examples
Optimum for a linear drive system which requires a high speed and high accuracy. Easily achieve a tandem configuration or multi-head configuration.
Tandem configuration
The linear servo motors configured in tandem are suitable for large systems that require highly accurate synchronous operation between two axes.
Multi-head configuration
Multi-head systems enable control of two motor coils independently, thereby simplifying machine mechanisms. This system is suitable for machines that require a short cycle time.
Machine tools XYZ stage
Semiconductor/FPD
manufacturing systems
Electrical parts assembling/
manufacturing systems
Screen printing systems and large FPD coaters
Material handling systems
Multi-head material handling between machines
