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Application Examples

Suitable for low speed and high torque applications.

Coating and vapor deposition systems

Coating and vapor deposition systems

Spin-type cleaning systems for FPD/
semiconductor

Spin-type cleaning systems for FPD/semiconductor

FPD/semiconductor testing systems (XYθ tables)

FPD/semiconductor testing systems (XYθ tables)

Index table for machine tools

Index table for machine tools

Rotary axis for polishing systems

Rotary axis for polishing systems

Rotary axis for material handling robots

Rotary axis for material handling robots

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