Solutions
Embedded system solution (C controller)
Semiconductor manufacturing system
Achieve early line launch by standardizing communication specifications
Realizes SECS / GEM communication without PC or program
Overview
Install a C-language controller or C-language intelligent function module equipped with "SECS / GEM communication software" in each device, and distribute the "SECS / GEM communication software" communication specification setting file to each device manufacturer, thereby setting up an early line. To achieve. SECS / GEM communication can be performed without a PC or program, greatly reducing engineering costs. This solves the increase in online test man-hours due to communication specification reflection errors, which was a problem with conventional systems.
System configuration
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