Solutions
Robot solution
Clean field
System configuration image
Robot adoption points
High-speed loading / unloading of wafer cassette (hoop) by vertical articulated robot (long arm / clean compatible).
Uses a clean room compatible clean type robot and supports cleanliness ISO class 3.
Space-saving support
Layout construction that takes advantage of space-saving and wide operating range.
Compatible with a variety of cassettes
You can handle cassettes in a variety of positions, eliminating the need for specialized machines such as reversing machines.
Control device configuration image
iQ Platform strengthens cooperation between PLC, GOT and robot. Optimal implementation of system operation and visualization. Achieves efficient production management with various networks and MES interfaces.
Reduction of takt time by high-speed communication between robot and PLC on iQ Platform
Visualization of data by linking FA devices and wiring saving by various networks
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